| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent damage from spreading upon occurrence of emergency, even in an existing thermal treatment apparatus, with good workability at a low cost.SOLUTION: A thermal treatment apparatus 10 includes an apparatus body 20, and an external section 30 being attached externally to the apparatus body 20. The apparatus body 20 includes a heater 23 and a housing 21. The heater 23 is arranged around a chamber 22 and heats a work in the chamber 22. The housing 21 forms an enclosure space 41 enclosing the heater 23. The external section 30 includes a soft shell 31. The soft shell 31 forms a preliminary space 44 communicating with the enclosure space 41. The soft shell 31 has flexibility of changing the volume depending on the internal pressure of an airtight space constituted of the enclosure space 41 and the preliminary space 44.</p> |
