| 摘要 |
<p>PROBLEM TO BE SOLVED: To perform flattening grinding with a deflected work piece by using a freezing chuck.SOLUTION: A freezing and fixing liquid 3 is injected, for spreading, in a freezing chuck frame 2 by such amount as its depth becomes 2.5-10 mm. A work piece w is placed on the freezing and fixing liquid film, and then, temperature of the freezing chuck 2 is lowered to the 0°C or lower so that the freezing and fixing liquid film 3 is freezed and the work piece is freezed and fixed. Then, while grinding liquid is supplied to a process point at which the work piece w contacts to grinders 4, 40, the work piece surface is ground by relative movement between the grinder and the work piece.</p> |
