MANUFACTURING METHOD AND MANUFACTURING APPARATUS OF SPLIT BODY

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method and a manufacturing apparatus which are capable of efficiently dicing a ceramic plate to manufacture a split body and are preferable for manufacturing a substrate for power module having a ceramic substrate.SOLUTION: A manufacturing apparatus 100 of a substrate for power module (split body) comprises: a support member 40 which supports four corner parts of a split groove forming surface 20a of a ceramic plate 20 on which first and second split grooves 21 are formed from below; and a splitting blade 60 which presses a pressing surface 20b on the opposite side of the split groove forming surface 20a along the split groove 21. The splitting blade 60 has a first splitting blade 60A which is pushed along the first split groove 21A and a second splitting blade 60B which is pushed along the second split groove 21B. Both splitting blades 60A, 60B are provided in such a manner that the central part of the first splitting blade 60A is projected from both end portions of the second splitting blade 60B, and a projection height h the blade is set to the maximum deflection amount or less of the ceramic plate 20 created by the first splitting blade 60A.