| 摘要 |
PROBLEM TO BE SOLVED: To enhance inspection accuracy of an inspection device using a TDI sensor.SOLUTION: An inspection device comprises: a first optical system that emits either one of a charged particle and an electromagnetic wave as a beam; a moving unit that can hold an inspection object and moves the inspection object in a prescribed direction on a position exposed to the beam by the first optical system; a TDI sensor that has a prescribed number of stages of imaging elements arrayed in a prescribed direction, uses a time delay integration method to integrate a secondary charge particle quantity, along the prescribed direction, which is obtained by the exposure of the inspection object to the beam performed while moving the moving unit in the prescribed direction, and transfers an integration result as an integrated detection quantity; an image data generation unit that generates image data on the basis of the integrated detection quantity; and a normalization unit that normalizes the integrated detection quantity or the image data on the basis of time required for the moving unit to move by prescribed distance during the integration. |
