| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method of producing a thin sample for a transmission electron microscope by ion milling, capable of reducing a thickness of an amorphous layer generated by processing damage and injection to the sample, of metal ions (e.g., Ga ions) used for an ion beam.SOLUTION: A sample 200 is arranged in parallel to an electric charge particle beam (an electron beam or an ion beam) 206. Gas jet flow (e.g., a rare gas) 207 is led from a metal capillary 201 to the sample. A voltage is applied to between the sample and the metal capillary by a power supply 208. The electric charge particle beam is led so as to cross the gas jet flow to ionize the gas jet flow. The sample is irradiated with the generated ions by a low electric field generated between the sample and the metal capillary, and milled at a low energy.</p> |
