发明名称 ENERGY BEAM IRRADIATION SYSTEM AND WORK TRANSFER MECHANISM
摘要 <p>PROBLEM TO BE SOLVED: To improve the throughput dramatically, and to use the energy beam efficiently, in an energy beam irradiation system.SOLUTION: An energy beam irradiation system includes an energy beam injection mechanism, and a work holder 21 for transferring a work W, to be irradiated with the energy beam, between a predetermined work transfer area and an energy beam irradiation area AR. The work transfer areas are provided at two points facing each other while holding a virtual straight line C passing through the irradiation area AR. As the work holder 21, a first work holder 21(1) moving between one work transfer area and the irradiation area AR, and a second work holder 21(2) moving between the other work transfer area and the irradiation area AR are provided.</p>
申请公布号 JP2014203713(A) 申请公布日期 2014.10.27
申请号 JP20130079779 申请日期 2013.04.05
申请人 NISSIN ION EQUIPMENT CO LTD 发明人 ONODA MASATOSHI;TATEMICHI JUNICHI;MATSUMOTO TAKESHI
分类号 H01J37/317;H01L21/265 主分类号 H01J37/317
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