| 摘要 |
<p>A control unit performs servo control of a table, which is a load, by performing feedback control of a servomotor. An inverse characteristic model performs feedforward compensation control by obtaining a speed compensation signal that compensates for the dynamic errors of a mechanical system. When the rigidity of a screw section of a ball screw along the axial direction changes, a rigidity-change compensation unit changes the rigidity value of the screw section along the axial direction that is included in the compensation control transfer functions of the inverse characteristic model, in accordance with the change in rigidity. Thus, the servo control apparatus compensates for such changes in rigidity and performs accurate servo control of the position of the table, even when the ball screw of a feeding mechanism expands or contracts due to secular change or change in temperature, and rigidity along the axial direction changes.</p> |
