| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a high-reliability plasmon generator.SOLUTION: A manufacturing method of a plasmon generator includes the steps of: forming an initial film 501 including a to-be-plasmon generator portion formed of a metal polycrystalline material and to be a plasmon generator later; heating the initial film 501 using heating light on at least the to-be-plasmon generator portion, so as to grow a plurality of crystal grains composing the metal polycrystalline material; stopping the heating of the initial film 501; and processing the initial film 501 to form a plasmon generator, after the step of stopping the heating. The step of forming a plasmon generator includes a step of forming a front end face for generating near-field light on the to-be-plasmon generator portion. |
