| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe assembly and a probe substrate which uniformize the load at the time of contact with a test piece to improve accuracy of testing.SOLUTION: The probe assembly includes: a reinforcing plate 12; a wiring board 14 disposed on the lower surface side of the reinforcing plate 12; a probe substrate 18 which includes a plurality of probes 182 formed on a lower surface thereof and a plurality of anchor parts 181 which are formed on an upper surface thereof so that the heights of the anchor parts 181 formed in a center portion in a planar view is greater than the heights of the anchor parts 181 formed in peripheral portions, and is disposed on the lower surface side of the wiring board 14; an elastic connector 16 which is disposed between the wiring board 14 and the probe substrate 18 and electrically connects the wiring board 14 and the plurality of probes 182; and a plurality of pole braces 121 which are disposed between the plurality of anchor parts 181 and the reinforcing plate 12 so as to correspond to the plurality of anchor parts 181 and determine a space between the probe substrate 18 and the wiring board 14 along with the plurality of anchor parts 181. |
