| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning type probe microscope that enables a surface shape of even a specimen having a hard part and a soft part mixed to be highly accurately and stably measured.SOLUTION: The scanning type probe microscope comprises: an excitation part 14 that oscillates a cantilever 12 on the basis of an excitation signal; a displacement detection part 15 that outputs a displacement signal showing a displacement of the cantilever 12; a phase adjustment part 30 that imparts a phase difference between the excitation signal and the displacement signal a phase offset; a phase signal generation part that generates a phase signal including the phase difference between the excitation signal and the displacement signal and information about the phase offset; and a controller 25 that controls a distance between a probe 11 and a specimen 19 on the basis of the phase signal. The phase adjustment part 30 adds a first phase amount cancelling an initial phase difference existing in a state where the probe 11 and the specimen 19 are not in contact with each other and a second phase amount more than (0[rad]) and less than (&pgr;/2[rad]), and imparts the phase difference the added phase amount as a phase offset. |
