FILM SAMPLE FOR SURFACE ANALYSIS AND FILM SAMPLE SAMPLING JIG, AND SAMPLING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a film sample for surface analysis with high flatness and a film sample sampling jig which are capable of performing proper surface analysis, and a sampling method.SOLUTION: The film sample for surface analysis is characterized in that a surface of an edge part of a surface analysis sample is located in a position with the same height as or lower than an analysis surface, and a maximum amplitude of a shape of the edge part in a depth direction of the analysis sample is equal to or less than 500 nm. A film sample sampling jig and a sampling method are also provided.