发明名称 EXPANDABLE FILM, AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE BY USING THE FILM
摘要 PROBLEM TO BE SOLVED: To provide an expandable film which is useful for, for example, laser dicing and has high transparency.SOLUTION: The expandable film includes a base material layer 13 having 80-1,000 MPa tensile modulus and a low friction layer 11. The low friction layer comprises a resin composition containing: 100 pts. mass of one or more resins selected from the group consisting of thermoplastic resins and thermosetting resins; and 0.01-10,000 pts. mass of silylated polyolefin obtained by a reaction of a silicon-containing compound, which has the structural unit shown by -Si(R)H-Y- (in which Ris a hydrogen atom, a halogen atom or a hydrocarbon group; Yis O, S or NR(Ris a hydrogen atom or a hydrocarbon group), with vinyl group-containing polyolefin having 100-500,000 number-average molecular weight to be measured by a GPC method. The expandable film has 9% or lower haze.
申请公布号 JP2014200949(A) 申请公布日期 2014.10.27
申请号 JP20130077091 申请日期 2013.04.02
申请人 MITSUI CHEMICALS TOHCELLO INC 发明人 HAYASHISHITA HIDEJI;OZAKI KATSUTOSHI;MORIMOTO TETSUMITSU
分类号 B32B27/32;B32B7/02;C08L23/26;C08L101/00;H01L21/301 主分类号 B32B27/32
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