| 摘要 |
PROBLEM TO BE SOLVED: To shorten the time required for alignment.SOLUTION: On the surface of a plate-like material (3), an alignment mark (19) to be recognized by the imaging means (9) of an alignment device (1) is formed. A direction indication mark (21) indicates the direction of the alignment mark (19) from the place where it is formed. A plurality of direction indication marks (21) are formed, at intervals, in the visual field range of the imaging means (9). The plurality of direction indication marks (21) are formed to surround an alignment mark (19). |
