| 摘要 |
PROBLEM TO BE SOLVED: To provide a length measuring device capable of performing highly accurate length measurement by suppressing positional deviation of a slider unit supported by a support part provided integrally with a head part casing, with respect to a mount fixing point of the head part casing, caused by thermal deformation of the head part casing.SOLUTION: Stress caused by deformation of deformation means (cover 41) which is deformed larger than deformation, caused by a thermal change, of a head part casing 40 accommodating a signal processing part 44 to which a detection signal obtained by a sensor 31 for detecting scales recorded on a scale body 11 is supplied, is transferred to the head part casing 40 via stress transfer means (45A and 45B, and shims 60A and 60B), thereby suppressing positional deviation of a slider unit 30 supported by support parts 43A and 43B provided integrally with the head part casing 40, with respect to mount fixing points (mounting holes 70A and 70B of the head part casing 40, caused by thermal deformation of the head part casing 40. |
