发明名称 SEMICONDUCTOR DEVICE MANUFACTURING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To efficiently encapsulate a semiconductor element by an encapsulation layer composed of a resin composition and manufacture a semiconductor device with high accuracy.SOLUTION: A semiconductor device manufacturing method comprises: attaching on distribution regions of a plurality of semiconductor elements formed on a semiconductor wafer W, a plurality of encapsulation sheet pieces each of which is cut into an area smaller than that of the distribution region and which are cut along a dividing line surrounding the plurality of semiconductor elements C on a whole area of the distribution regions of the semiconductor elements C; holding the semiconductor wafer W which encapsulates the semiconductor elements C by hardening the encapsulation layer, on a ring frame via a dicing tape, and subsequently transferring the semiconductor wafer W to a dicing process; cutting the semiconductor wafer W along dividing lines; and expanding the dicing tape to manufacture semiconductor devices.</p>
申请公布号 JP2014204033(A) 申请公布日期 2014.10.27
申请号 JP20130080601 申请日期 2013.04.08
申请人 NITTO DENKO CORP;NITTO SEIKI CO LTD 发明人 YAMAMOTO MASAYUKI;MORI SHINICHIRO
分类号 H01L21/56 主分类号 H01L21/56
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