发明名称 RESIN COMPOSITION AND PATTERN FORMATION METHOD USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a resin composition having good photosensitive properties, and forming a cured film at low final curing temperature, and allowing high weight reduction temperature of the cured film.SOLUTION: A resin composition contains (a) a polyimide precursor having a carbon-carbon unsaturated double bond (represented by the formula (1)), (b) a compound generating a radical by active ray irradiation, (c) a compound having a dimethacrylate structure as methacrylic acid at both terminals of 1 to 3 propylene oxide structures or a compound having a propylene oxide oligomer structure, and (d) a solvent. [In the general formula (1), Rand Rare each independently a hydrogen atom or a monovalent organic group. In this regard, 80% or more of Rand Rin the formula (1) is a monovalent organic group having a carbon-carbon unsaturated double bond.]
申请公布号 JP2014201695(A) 申请公布日期 2014.10.27
申请号 JP20130080526 申请日期 2013.04.08
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD 发明人 SOEJIMA KAZUYA;OE TADAYUKI
分类号 C08F2/44;C08F2/50;G03F7/027;G03F7/031;H01L21/027 主分类号 C08F2/44
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