ROTARY ACTUATOR

摘要

PROBLEM TO BE SOLVED: To inhibit characteristics of a rotary actuator from deviating from a design value.SOLUTION: Support shafts 130 attach a movable electrode 110 to a frame body 120 and serve as rotation shafts of the movable electrode 110. Fixed electrodes 140 face movable side second sides 112 of the movable electrode 110 in a plane view. A first recessed part 116 is provided on each movable side first side 111 of the movable electrode 110, and a second recessed part 122 is provided at a position of each frame side first side 121 of the frame body 120 which faces the first recessed part 116. Each support shaft 130 is attached to the first recessed part 116 at one side and is attached to the second recessed part 122 at the other side.