发明名称 MIRROR UNIT AND EXPOSURE APPARATUS
摘要 A mirror unit comprises: a mirror; multiple non-contact actuators which include an operator and a stator, and is formed to change the shape of the mirror; a supporting plate where the stator is fixated; and a structure which is to retain and support the mirror and the supporting plate. The operator is attached to a surface opposite to an optical surface of the mirror. The structure retains and supports the supporting plate through kinematic mount.
申请公布号 KR20140124325(A) 申请公布日期 2014.10.24
申请号 KR20140039224 申请日期 2014.04.02
申请人 CANON KABUSHIKI KAISHA 发明人 SAI CHOSHOKU
分类号 G02B7/02;G02B23/00;G03F7/20 主分类号 G02B7/02
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