发明名称 MAINTENANCE METHOD
摘要 PROBLEM TO BE SOLVED: To provide a light source device capable of suppressing deterioration of a rate of operation.SOLUTION: A light source device comprises: an opening in which at least a part of a lamp is arranged; a reflecting mirror which is installed at the surrounding of the opening and includes a reflecting surface of a concave shape for reflecting light emitted from the lamp; and a reflecting surface air feeding part which leads gas at least to the reflecting surface in the vicinity of the opening.
申请公布号 JP2014199938(A) 申请公布日期 2014.10.23
申请号 JP20140118922 申请日期 2014.06.09
申请人 NIKON CORP 发明人 KIKUCHI TAKAYUKI;ABE FUMIHIKO
分类号 H01L21/027;F21V29/02;G03F7/20 主分类号 H01L21/027
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