DRYER AND DRY PROCESSING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a dryer which efficiently eliminates a solvent in an organic material film applied to a substrate in a short time and enables uniform dry processing on a surface of the substrate, and to provide a dry processing method.SOLUTION: A dryer 100 includes: a processing container 1 which enables vacuum drawing; a placement base 3 which serves as a support member for supporting a substrate S in the processing container 1; a gas jet device 5 which jets a gas to an organic material film on the substrate S supported by the placement base 3; and a control section 6. The dryer 100 includes a pressure control mechanism for controlling a pressure in the processing container 1. Multiple nozzles 51 are formed so that a user is able to adjust a gas jet flow rate and a type of the gas for each nozzle 51.