RADIATION COLLECTOR, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

摘要

A radiation collector comprising a plurality of reflective surfaces, wherein each of the plurality of reflective surfaces is coincident with part of one of a plurality of ellipsoids, wherein the plurality of ellipsoids have in common a first focus and a second focus, each of the plurality of reflective surfaces coincident with a different one of the plurality of ellipsoids, wherein the plurality of reflective surfaces are configured to receive radiation originating from the first focus and reflect the radiation to the second focus.