| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic EL element having a high reliability, and to provide a deposition device that can produce an organic EL element having high reliability.SOLUTION: A first step of heating and evaporating a deposition material in a pressure-reduced deposition chamber, and a second step of depositing a layer included in an EL layer in the deposition chamber are performed while exhausting air and measuring a water partial pressure in the deposition chamber by means of a mass spectrometer. When the second step is started, the water partial pressure is at a value smaller than an average value of the water partial pressures at the first step. Alternatively, the deposition chamber included in a deposition device has a deposition material chamber, and is connected with an air exhaustion mechanism. The deposition material chamber is partitioned from the deposition chamber by a partition valve, has a deposition material holding part having a heating mechanism, and is connected with the mass spectrometer and the air exhaustion mechanism. Since impurities such as moisture included in the deposition material can be sufficiently removed in the deposition material chamber in advance, the moisture derived from the deposition material is suppressed from diffusing in the deposition chamber. |
