| 摘要 |
PROBLEM TO BE SOLVED: To provide efficient and an effective cMUT apparatus and method, and a method of using the apparatus.SOLUTION: A capacitive ultrasound transducer capable of operating in a collapsed mode either with a reduced bias voltage or with no bias voltage is provided. The transducer includes a substrate that is contoured so that a middle region of the flexible membrane is collapsed against the substrate in the absence of a bias voltage. A non-collapsible gap exists between the substrate and peripheral regions of the flexible membrane. The contour of the substrate either strains the flexible membrane past the point of collapse, or mechanically interferes with the flexible membrane. The substrate includes a further membrane disposed beneath the flexible membrane, the further membrane being contoured so that the flexible membrane is collapsed against the further membrane. The substrate may be a support disposed beneath the further membrane to deflect a corresponding portion of the further membrane upward toward the flexible membrane. The support may be a post. |
