| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent wetting-up and spreading of a vapor deposition material out of a material container and suppress variation of the film deposition rate.SOLUTION: In the upper end part of a material container (hearth liner 6A), there is provided an inner-diameter protrusion part 14A which is composed of a material of low wettability, protrudes toward the opening center of the material container and has one or both of a downgrade inclined part 14a and a downward step part 14b toward the opening center, and a vapor deposition material supply part (guide 13) which guides a vapor deposition material from the obliquely upper side of the material container to the inner-diameter protrusion part 14A is also provided. Wetting-up and spreading of a vapor deposition material out of a material container is prevented and variation of the film deposition rate is suppressed.</p> |
