发明名称 |
Microphone Module and Method of Manufacturing Thereof |
摘要 |
A microphone module includes a package including a semiconductor chip and having a recess on an upper surface and a micro-electro-mechanical microphone being electrically connected to the package. Further, the micro-electro-mechanical microphone is arranged on the upper surface of the package. The recess forms an acoustic back volume of the micro-electro-mechanical microphone. |
申请公布号 |
US2014312439(A1) |
申请公布日期 |
2014.10.23 |
申请号 |
US201313866084 |
申请日期 |
2013.04.19 |
申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
Hoegerl Juergen;Theuss Horst |
分类号 |
B81B7/00;B81C1/00 |
主分类号 |
B81B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
1. A microphone module, comprising:
a package body having a recess on an upper surface; a semiconductor chip embedded in the package body; and a micro-electro-mechanical microphone chip comprising an electro-mechanical element arranged over the recess and electrically connected to the semiconductor chip. |
地址 |
Neubiberg DE |