Method for Forming Projections and Depressions, Sealing Structure, and Light-Emitting Device

摘要

A novel method for forming projections and depressions is provided. A novel sealing structure is provided. A novel light-emitting device is provided. A first step of forming a film containing at least two kinds of metals having different etching rates over a surface; a second step of heating the film so that the metal having a lower etching rate segregates; a third step of selectively etching the metal having a higher etching rate; and a fourth step of selectively etching the surface using a residue containing the metal having a lower etching rate are included.

主权项

1. A method for forming projections and depressions, comprising:
forming a film over a surface, the film containing a first metal and a second metal whose etching rate is lower than an etching rate of the first metal; heating the film so that the second metal segregates; selectively etching the first metal after heating the film; and selectively etching the surface using a residue containing the second metal as a resist mask.