发明名称 METHOD OF MANUFACTURING TRANSPARENT FLEXIBLE DISPLAY DEVICE AND TRANSPARENT FLEXIBLE DISPLAY DEVICE MANUFACTURED USING THE METHOD
摘要 A method of manufacturing a transparent flexible display device includes forming a protection layer on a first surface of a transparent substrate, forming a transparent polymer layer on the protection layer, forming an amorphous silicon pattern on the transparent polymer layer, irradiating a first laser on the amorphous silicon pattern to dehydrogenate the amorphous silicon pattern, irradiating a second laser on the dehydrogenated amorphous silicon pattern to form a polycrystalline silicon pattern, forming a metal pattern on the polycrystalline silicon pattern, forming a display element electrically connected to the metal pattern, and irradiating a third laser on a second surface of the transparent substrate to separate the transparent polymer layer from the protection layer.
申请公布号 US2014312328(A1) 申请公布日期 2014.10.23
申请号 US201414218959 申请日期 2014.03.18
申请人 Samsung Display Co., Ltd. 发明人 Yoon Young-Sik;Lee Sang-Jo
分类号 H01L51/50;H01L51/56;H01L51/00 主分类号 H01L51/50
代理机构 代理人
主权项 1. A method of manufacturing a transparent flexible display device, the method comprising: forming a protection layer on a first surface of a transparent substrate; forming a transparent polymer layer on the protection layer; forming an amorphous silicon pattern on the transparent polymer layer; irradiating a first laser on the amorphous silicon pattern to dehydrogenate the amorphous silicon pattern; irradiating a second laser on the dehydrogenated amorphous silicon pattern to form a polycrystalline silicon pattern; forming a metal pattern on the polycrystalline silicon pattern; forming a display element electrically connected to the metal pattern; and irradiating a third laser on a second surface of the transparent substrate to separate the transparent polymer layer from the protection layer.
地址 Yongin-City KR