DIFFERENTIAL PRESSURE-TYPE LEAKAGE EXAMINING DEVICE AND LEAKAGE EXAMINING METHOD

摘要

The present invention relates to a differential pressure-type leakage examining device and a differential pressure-type leakage examining method comprising: a jig for fixing an object to be examined; a compressed air injection portion for applying compressed air to an examining area between the jig and the object to be examined; and a leakage detection portion for detecting whether the object to be examined is leaking, wherein a compressed air temperature control portion for controlling the temperature of the compressed air is provided between the jig and the compressed air injection portion, thereby minimizing temperature change during leakage examination and reducing air leakage deviation, and thus improving the reliability of detection and precision of detection.