| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas detection device which can selectively detect unsaturated fluorocarbon or carbonyl sulfide used as dry etching gas.SOLUTION: A gas detection device includes: filters 11 and 21 which have sulfuric acid silica gel layers 11a and 21a and porous polymer bead layers 11b and 21b, and which make at least one of unsaturated fluorocarbon and carbonyl sulfide penetrate; and a sensor part 2 which detects the gas which penetrates filters 11 and 21. |
