| 摘要 |
PROBLEM TO BE SOLVED: To provide holding means capable of performing the handling of a work-piece inexpensively and having no fear that paste and an adhesive remain on the surface of the work-piece.SOLUTION: Holding means has a holding surface which holds a work-piece having a central region and an outer peripheral excess region surrounding the central region. The holding surface corresponding to the central region of at least the work-piece is formed by a flexible member. The holding means includes: a plurality of suction holes which open to the holding surface corresponding to the outer peripheral excess region of the work-piece; and a suction path having one end communicated with the suction hole and the other end selectively connected to a suction source. |
