MAGNETIC HEAD INSPECTION DEVICE AND MAGNETIC HEAD INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To cope with measurement of a weak magnetic field by optimizing operation conditions of a magnetic force microscope.SOLUTION: A magnetic head inspection device comprises: XY stages 11 and 12 on which a magnetic head (row bar 1) is mounted and which performs scanning two dimensionally; a cantilever 7 which has a magnetic probe on its tip end and is excited in a prescribed frequency; a Z stage 13 which holds the cantilever at a prescribed height from the surface of the magnetic head; a displacement detection unit 44 which detects an amount of displacement of the cantilever caused by a magnetic field generated by the magnetic head, and outputs a displacement signal; calculation means which obtains an effective track width of the magnetic head on the basis of the distribution of the displacement signal; and a control unit 30 which sets an amplitude of the cantilever and a height of the cantilever from the surface of the magnetic head on the basis of the size of the magnetic head.