| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method for refining silicon capable of removing impurities from metallic silicon, particularly, boron.SOLUTION: Refining is performed through: a first step of temporarily converting boron-containing metallic silicon into silicon; and a second step of partially heating and decomposing silicon nitride 6 obtained in the first step so as to be molten silicon 9, remaining the boon as boron nitride in a solid phase 7, and discharging only a liquid phase to obtain the silicon 9 freed from a boron component. The heating is performed at 1,900 to 2,400°C under a high vacuum with electron beams.</p> |
