Full Wafer Processing By Multiple Passes Through A Combinatorial Reactor

摘要

Overlapping combinatorial processing can offer more processed regions, better particle performance and simpler process equipment. In overlapping combinatorial processing, one or more regions are processed in series with some degrees of overlapping between regions. In some embodiments, overlapping combinatorial processing can be used in conjunction with non-overlapping combinatorial processing and non-combinatorial processing to develop and investigate materials and processes for device processing and manufacturing.

主权项

1. A method comprising:
processing first site isolated regions on a surface of a substrate using a plurality of site isolated reactors in a combinatorial manner; moving the plurality of site isolated reactors relative to the substrate; and processing second site isolated regions on the surface of the substrate using the plurality of site isolated reactors,
wherein each of the first site isolated regions is separated from any other one of the first site isolated regions,wherein each of the second site isolated regions is separated from any other one of the second site isolated regions, andwherein at least one of the first site isolated regions touches or overlaps with at least one of the second site isolated regions.