| 发明名称 |
NON-CONTACT SUBSTRATE TRANSFER TURNER |
| 摘要 |
Disclosed herein is a non-contact substrate transfer turner capable of performing a transfer and a turn-over of a substrate in a non-contact state. The non-contact substrate transfer turner includes a transfer member moving along a guide rail; a substrate supporting member installed at the transfer member and non-contact supporting a substrate by drag force and lift force; and a power transmitting member providing power to the substrate supporting member to rotate the substrate supporting member. |
| 申请公布号 |
US2014314539(A1) |
申请公布日期 |
2014.10.23 |
| 申请号 |
US201314049778 |
申请日期 |
2013.10.09 |
| 申请人 |
Samsung Electro-Mechanics Co., Ltd. |
发明人 |
LEE Yong Kwan;KIM Sun;KIM Hyun Su |
| 分类号 |
H01L21/68 |
主分类号 |
H01L21/68 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A non-contact substrate transfer turner, comprising:
a transfer member moving along a guide rail; a substrate supporting member installed at the transfer member and non-contact supporting a substrate by drag force and lift force; and a power transmitting member providing power to the substrate supporting member to rotate the substrate supporting member. |
| 地址 |
Suwon KR |
