发明名称 MEMORY DEVICE AND MANUFACTURING METHOD THEREOF AND ACCESS METHOD
摘要 <p>A memory device and manufacturing method thereof, and an access method. The memory device may comprise: a substrate (100); a back-gate (120) formed on the substrate (100); a transistor, including fins (104) formed at the two opposite sides of the back-gate (120) on the substrate (100) and a gate stack formed on the substrate (100), the gate stack intersecting the fin (104); and back-gate dielectric layers (116) between the back-gate (120) and each fin (104) and between the back-gate (120) and the substrate (100), there being openings arranged on the back-gate dielectric layer (116) at one side of the gate stack, the back-gate (120) being electrically connected to the fins through said openings.</p>
申请公布号 WO2014169506(A1) 申请公布日期 2014.10.23
申请号 WO2013CN76484 申请日期 2013.05.30
申请人 INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OFSCIENCES 发明人 ZHU, HUILONG
分类号 H01L29/78;H01L21/02 主分类号 H01L29/78
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