| 摘要 |
<p>A carrier device according to an aspect of an embodiment includes a carrier chamber, a robot that is placed near one longitudinal-side wall in the carrier chamber, and a linear moving mechanism that has a track by which the robot is linearly moved in the longitudinal direction of the carrier chamber. The arm of the robot is defined to a length by which the arm does not interfere with the other longitudinal-side wall even if the arm is rotated around an arm spindle. The track of the linear moving mechanism has a length by which the leading end of the hand perpendicular to the track reaches a predetermined position in a connecting hole located at an end among connecting holes provided in the longitudinal-side wall.</p> |
