发明名称 ALIGNING APPARATUS
摘要 <p>Disclosed in the present invention is an aligning apparatus which can prevent the deflection of glass in a process of aligning the glass and a mask. The disclosed aligning apparatus comprises: loaders which are placed to move backward to glass that is transferred by a transfer robot, and fixate the position of the glass; a mask holder which supports a rectangular mask; and a mask holder elevating unit which elevates the mask holder toward the glass whose position is fixated to the loader. The loaders support the bottom of the glass transferred by the transfer robot, and are placed at least three directions including a first direction, that is, the moving direction of the transfer robot which enters a gate formed in an evaporation chamber in order to transfer the glass with the evaporation chamber.</p>
申请公布号 KR20140123845(A) 申请公布日期 2014.10.23
申请号 KR20130041222 申请日期 2013.04.15
申请人 WONIK IPS CO., LTD. 发明人 HWANG, SE HAN;JO, JUN HEE;BYEON, JU SUN;LEE, SANG BONG
分类号 H01L21/68;H01L21/205;H01L21/677;H01L51/56 主分类号 H01L21/68
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