VAPOR DEPOSITION DEVICE, AND METHOD FOR MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition device, and a method for manufacturing an organic light emitting display device.SOLUTION: A vapor deposition device 1 for vapor-depositing a vapor deposition material to a substrate 2 comprises: a vapor deposition source 10 opposed to the substrate 2 and emitting the vapor deposition material; a patterning slit sheet 30 having a slit 31 for vapor-depositing a desired pattern to the substrate 2 and opposed to the substrate 2; a frame 35 coupled with the patterning slit sheet 30; and a stage 60 supporting the frame 35 and jointed to the frame 35. Isolation spaces SA isolated from each other are formed between the frame 35 and the stage 60.