| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a processing system and a processing method, which can achieve improvement in production efficiency.SOLUTION: A processing system 1 comprises: a first processing device 50a; a second processing device 50b; a storage part; a load lock part 30 provided between the load lock part, and the first processing device and the second processing device; a first delivery part 20 provided between the storage part and the load lock part, for delivering a processed object; a second delivery part 40 provided between the load lock part, and the first processing device and the second processing device, for delivering the processed object; and a control part 60 for controlling the first delivery part, in which the control part controls the first delivery part so as to reduce a wait time of the second delivery part in delivery of the processed object to the second processing device when a processing time in the second processing device is longer than a processing time in the first processing device.</p> |
