LASER PROCESSING APPARATUS, METHOD OF LASER PROCESSING, METHOD OF FABRICATING SUBSTRATE, AND METHOD OF FABRICATING INKJET HEAD

摘要

In the case where the workpiece (1) is processed, the laser beam is S-polarized by an optical modulator (7). Thus, the laser beam is mainly diverted toward a workpiece (1) by a polarizer (6). An optical path through which the laser beam passes is caused to have a high light converging ability with respect to a target spot by an optical device (9). In the case where the workpiece (1) is not processed, the laser beam is P-polarized by the optical modulator (7). Thus, the laser beam is mainly diverted to a beam damper (10) side by the polarizer (6). However, the workpiece 1 is irradiated with the laser beam having leaked from the polarizer (6). An optical path through which the laser beam passes is caused to have a low light converging ability with respect to the target spot by the optical device (9).

主权项

1. A laser processing apparatus comprising:
a laser oscillator; a polarization direction switching member that switches a polarization direction of a laser beam emitted from the laser oscillator; a splitting member that splits the laser beam in accordance with the polarization direction having been switched by the polarization direction switching member; a light converging ability changing member that changes a light converging ability of the laser beam, the laser beam being split by the splitting member; and a control unit that controls the polarization direction switching member and the light converging ability changing member in accordance with a state in which processing is being performed on the workpiece.