发明名称 METHOD FOR FABRICATING AN EMBEDDED PATTERN USING A TRANSFER-BASED IMPRINTING
摘要 In a method for fabricating an embedded pattern using a transfer-based imprinting, an adhesive layer is formed on a substrate. The adhesive layer has a photo curable resin. A stamp having a protruded pattern is prepared. A thin-film layer is formed on an outer surface of the protruded pattern of the stamp. The stamp having the thin-film layer contact with the adhesive layer is pressed to selectively transfer the thin-film layer of the protruded pattern to the adhesive layer. Ultraviolet rays (UV) are irradiated to cure the adhesive layer. The stamp is removed.
申请公布号 US2014311662(A1) 申请公布日期 2014.10.23
申请号 US201414194084 申请日期 2014.02.28
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS 发明人 CHOI Jun-Hyuk;LEE Eung-Sug;LEE Ji-Hye;JEONG Jun-ho;JUNG Joo-Yun;CHOI Dae-Guen;KIM Cheol-Hyeon
分类号 B32B37/00 主分类号 B32B37/00
代理机构 代理人
主权项 1. A method for fabricating an embedded pattern using a transfer-based imprinting, the method comprising: forming an adhesive layer on a substrate, the adhesive layer having a photo curable resin; preparing a stamp having a protruded pattern, a thin-film layer being formed on an outer surface of the protruded pattern of the stamp; pressing the stamp having the thin-film layer contact with the adhesive layer, to selectively transfer the thin-film layer of the protruded pattern to the adhesive layer; irradiating ultraviolet rays (UV) to cure the adhesive layer; and removing the stamp.
地址 Daejeon KR