Electricoacoustic Component with Structured Conductor and Dielectric Layer

摘要

An electroacoustic component includes a substrate configured to carry acoustic waves. The electroacoustic component can be a guided bulk acoustic wave (GBAW) device, for example. A structured electric conductive layer is arranged on the substrate and an electrically dielectric layer (for example, aluminum oxide) is also arranged over the substrate.

主权项

1. An electroacoustic component, comprising:
a substrate configured to carry acoustic waves; a structured electric conductive layer arranged on the substrate; and an electrically dielectric layer arranged over the substrate.