发明名称 VIBRATION PIECE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a vibration piece with an adjusting electrode that is adaptive to either of leakage vibrations which are 180° out of phase with each other.SOLUTION: For detection of an angular velocity, vibrations are excited by a driving vibration arm. Detecting vibration arms 26a, 26b send out output signals corresponding to Coriolis force. At the same time, adjusting electrodes 28a, 28b output electric signals. Components of the leakage vibrations are canceled at least partially by the electric signals of the adjusting electrodes 28a, 28b. One of the adjusting electrodes 48b, 48c is selectively disconnected from a grounding electrode 47a as cutting traces 52a to 52d are formed, and the other adjusting electrode 48a is still connected to the grounding electrode 47a. Thus, phases of the electric signals output selectively by the adjusting vibration arms 28a, 28b are established.
申请公布号 JP2014199194(A) 申请公布日期 2014.10.23
申请号 JP20130074093 申请日期 2013.03.29
申请人 SEIKO EPSON CORP 发明人 NAKAGAWA HIROSHI;NISHIZAWA RYUTA;YAMAGUCHI KEIICHI
分类号 G01C19/5628;H01L41/047;H01L41/113 主分类号 G01C19/5628
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