摘要 |
PROBLEM TO BE SOLVED: To provide a flow path unit, a liquid ejecting head, and a liquid ejecting apparatus which can meet the need for higher density of a nozzle.SOLUTION: A flow path unit U0 comprises a deformable diaphragm 11, and a pressure chamber 21 in which pressure is applied to liquid F by the deformation of the diaphragm 11 as part of a wall. At least one layer of the diaphragm 11 of the flow path unit U0 is mainly composed of cubic crystal zirconia, and a wall of the pressure chamber 21 different from the diaphragm 11 is mainly composed of tetragonal zirconia. |