发明名称 FLOW PATH UNIT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND MANUFACTURING METHOD OF FLOW PATH UNIT
摘要 PROBLEM TO BE SOLVED: To provide a flow path unit, a liquid ejecting head, and a liquid ejecting apparatus which can meet the need for higher density of a nozzle.SOLUTION: A flow path unit U0 comprises a deformable diaphragm 11, and a pressure chamber 21 in which pressure is applied to liquid F by the deformation of the diaphragm 11 as part of a wall. At least one layer of the diaphragm 11 of the flow path unit U0 is mainly composed of cubic crystal zirconia, and a wall of the pressure chamber 21 different from the diaphragm 11 is mainly composed of tetragonal zirconia.
申请公布号 JP2014198398(A) 申请公布日期 2014.10.23
申请号 JP20130074405 申请日期 2013.03.29
申请人 SEIKO EPSON CORP 发明人 NAKAO HAJIME;NATORI EIJI
分类号 B41J2/045;B41J2/055 主分类号 B41J2/045
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