METHODS AND DEVICES FOR TREATING SURFACES WITH SURFACE PLASMA

摘要

Methods and devices for treating surfaces of objects using a non-thermal plasma are disclosed herein. The non-thermal plasma is generated through the use of an apparatus configured to generate a non-thermal plasma on its surface. The apparatus is comprised of a substrate that contains one or more electrodes of different polarity. The electrodes are placed within a layer of the substrate acting as a dielectric layer. The apparatus may also have additional layers to contain the dielectric layer. When an appropriate potential, being either an alternating current or pulsed high voltage potential, is applied and removed from the one or more electrodes, the gas on at least one surface of the apparatus becomes ionized and forms a non-thermal plasma. The electrodes can be configured to be of various shapes and sizes to modify or tune the plasma.

主权项

1. A method of treating an object comprising:
applying high potential signal to a first electrode or a second electrode, wherein the first electrode and the second electrode are disposed within a first layer of a substrate configured to be a dielectric, wherein the substrate further comprises a first outer surface, the high potential signal giving rise to the first electrode having a first potential disposed in the first layer, and a second electrode having a second potential disposed in the first layer, the high potential signal giving rise to a non-thermal plasma to be generated at the first outer surface; and applying the non-thermal plasma to the object for a period of time.