摘要 |
The invention relates to a temperature sensor, particularly a high-temperature sensor, having a coated substrate (16), at least one resistor structure (11) and at least two connection contacts (12, 13). The connection contacts (12, 13) electrically contact the resistor structure (11) and the substrate (16) is made of zirconium oxide or a zirconium oxide ceramic, wherein the zirconium oxide or the zirconium oxide in the zirconium oxide ceramic is stabilized with oxides of a trivalent and a pentavalent metal. The substrate (16) is coated with an insulation layer (17) and the resistor structure (11) and the free regions of the insulation layer (17), on which no resistor structure (11) is arranged are coated, at least in certain regions, with a ceramic intermediate layer, (18) and a protective layer (19) and/or a cover (20) is arranged on the ceramic intermediate layer (18). The invention also relates to a temperature sensor, particularly a high-temperature sensor, having a substrate (16), at least one resistor structure (11) and at least two connection contacts (12,13). The connection contacts (12, 13) electrically contact the resistor structure (11) and at least one electrode (14 15) is arranged, at least at one connection contact (12, 13), alongside the resistor structure (11) on the substrate (16). The electrode (14, 15) or the electrodes (14, 15) is or are formed integrally with the resistor structure (11). The resistor structure (11) and the free regions of the substrate (16), on which the resistor structure (11) is not arranged, are coated at least in certain regions with a ceramic intermediate layer (18), and a protective layer (19) and/or a cover (20) is arranged on the ceramic intermediate layer (18). Finally, the invention also relates to the use of such temperature sensors in an exhaust system for controlling and/or regulating an engine, particularly a motor vehicle engine. |