DEPOSITION APPARATUS, ORGANIC LIGHT EMITTING DISPLAY APPARATUS, AND METHOD OF MANUFACTURING ORGANIC LIGHT EMITTING DISPLAY APPARATUS USING THE DEPOSITION APPARATUS

摘要

A deposition apparatus includes a deposition unit including a plurality of deposition assemblies, which are separated from a substrate at a predetermined distance and deposit a material onto the substrate while a first transfer unit transfers the substrate. Each of the plurality of deposition assemblies includes a patterning slit sheet facing a deposition source nozzle unit, a positional information obtaining unit obtaining positional information regarding a position of the substrate transferred by the first transfer unit, and a sheet stage adjusting a position of the patterning slit sheet with respect to the substrate transferred by the first transfer unit according to the positional information.

主权项

1. A method of manufacturing an organic light-emitting display apparatus, the method comprising:
transferring a moving unit into a chamber by a first transfer unit that is installed so as to enter the chamber in a state where a substrate is fixed to the moving unit; forming a layer by causing deposition materials discharged from a plurality of deposition assemblies to be sequentially deposited onto the substrate while the first transfer unit transfers the substrate with respect to the plurality of deposition assemblies in a state where the substrate is separated from the plurality of deposition assemblies disposed within the chamber at a predetermined distance; and returning the moving unit separated from the substrate by a second transfer unit that is installed so as to enter the chamber, wherein each of the plurality of deposition assemblies includes: a deposition source configured to emit the deposition material; a deposition source nozzle unit that is disposed toward the first transfer unit from the deposition source and has a deposition source nozzle formed therein; a patterning slit sheet that is disposed so as to face the deposition source nozzle unit and in which a plurality of patterning slits are disposed in one direction; a positional information obtaining unit configured to obtain positional information regarding a position of the substrate on the moving unit transferred by the first transfer unit; and a sheet stage configured to adjust a position of the patterning slit sheet with respect to the substrate on the moving unit transferred by the first transfer unit, and wherein the forming of a layer includes forming a layer while adjusting the position of the patterning slit sheet by the sheet stage, according to the positional information obtained by the positional information obtaining unit.