| 发明名称 |
MEMS VIBRATOR, ELECTRONIC APPARATUS, AND MOVING OBJECT |
| 摘要 |
A MEMS vibrator includes: a vibrating portion; an electrode portion provided to face the vibrating portion with a gap therebetween; and a support portion extended in a first direction from the vibrating portion. The vibrating portion includes a functional portion having a different thickness viewed from the first direction. |
| 申请公布号 |
US2014312733(A1) |
申请公布日期 |
2014.10.23 |
| 申请号 |
US201414254259 |
申请日期 |
2014.04.16 |
| 申请人 |
Seiko Epson Corporation |
发明人 |
KIHARA Ryuji;IWAMOTO Osamu |
| 分类号 |
B81B3/00 |
主分类号 |
B81B3/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A MEMS vibrator comprising:
a vibrating portion; an electrode portion provided to face the vibrating portion with a gap therebetween; and a support portion extended in a first direction from the vibrating portion, wherein the vibrating portion includes a functional portion including a concave portion or a convex portion in a cross section viewed from the first direction. |
| 地址 |
Tokyo JP |
