| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To appropriately prevent the generation of turbulence in a recess on the rear side of a sensor chip including a sensing part as a thin portion without machining a case for supporting the sensor chip in a flow sensor in which the sensor chip is supported in a cantilever manner by the case. <P>SOLUTION: On a rear side 20b of a sensor chip 20, as a rigid body, a plate-like rear-side chip 30 is deposited to cover a recess 25 and on another side 30b of the rear-side chip 30, a portion corresponding to a support part 24 is fixed to a case 10, thereby supporting both the chips 20 and 30 in a cantilever manner by the case 10. On a depositing interface of both the chips 20 and 30, an open hole 31 opening the recess 25 to the outside is provided at the side of the rear-side chip 30, and the open hole 31 is configured as a tunnel formed from a groove 32 provided on one side 30a of the rear-side chip 30 and the sensor chip 20 cooperatively. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
