| 摘要 |
<p>#CMT# #/CMT# The method involves providing a sample (28) with multiple lighter and darker areas (30,32) which form spatial intensity sequences (34,36) with a spatial period. An object (50) is positioned with a surface (52) relative to the sample such that the intensity sequences drop at the surface. #CMT# : #/CMT# Independent claims are also included for the following: (1) a device for optical inspection of a partially reflective surface at an object; and (2) a computer program with program code. #CMT#USE : #/CMT# Method for optical inspection of a partially reflective surface at an object. #CMT#ADVANTAGE : #/CMT# The method involves providing a sample with multiple lighter and darker areas which form a spatial intensity sequence with a spatial period, and thus ensures accurate and cost-effective optical inspection method. #CMT#DESCRIPTION OF DRAWINGS : #/CMT# The drawing shows a side view of an optical inspection device. 28 : Sample 30,32 : Areas 34,36 : Intensity sequences 50 : Object 52 : Surface.</p> |
